Update:2018.05.16
Model No. | AXYR60-A2PR-ND | AXYR80-A2PR-ND | AXYR120-A2PR-ND |
AXYR60-A2PL-ND | AXYR80-A2PL-ND | AXYR120-A2PL-ND | |
Table Size | Ø60 | Ø80 | Ø120 |
Travel Stroke X-Axis | ±7.5mm | ±12mm | ±15mm |
Travel Stroke Y-Axis | ±7.5mm | ±12mm | ±15mm |
Travel Stroke θ-Axis | ±8.5° | ±10° | |
Drive Type | Ball screw | ||
XY Rail | Crossed roller guiding | ||
θ Rail | Circular Linear Ball Guiding | ||
Stage Material/Surface Treatment | Aluminum alloy/ Black andoized | ||
Accuracy Level | P:Precision | ||
XY Axis Resolution (Pulse)Full/Half | 5μm/2.5μm | ||
θ Axis Resolution (Pulse)Full/Half | 0.0056°/0.0028° | 0.0047°/0.0023° | 0.0034°/0.0017° |
XY Axis Maximum(Full Step) | 10mm/sec | ||
θ Axis Maximum(Full Step) | 8°/sec | ||
XY Axis Position Precision | 10μm | ||
XY Axis Repeatability Precision | ±1μm | ||
θ Axis Position Precision | 0.05° | ||
θ Axis Repeatability Precision | ±0.01° | ||
Load Capacity | 6kgf | 10kgf | 25kgf |
XY Axis Missed Step | 2μm | ||
θ Axis Missed Step | 0.01° | ||
Parallelism | 20μm | 30μm | |
Dynamic Straightness | 20μm | ||
Dynamic Parallelism | 10μm | 15μm | |
Motor Type | 2MS-N28D32A | 2MS-N28D45A | 2MS-N28D45A |
Motor Brand | GMT |
Model No. | AXYR |
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