Model No. |
EXYR80-A2PR-ND |
EXYR80-A2PL-ND |
|
Mechanical Spec. |
Table Size (mm) |
Ø 80 | Ø 80 |
XY-Axis Travel Stroke (mm) |
± 12 | ± 12 | |
θ-Axis Travel Stroke (°) |
± 10 | ± 10 | |
Drive Type |
Ball screw | Ball screw | |
XY-Axis Rail |
Crossed-roller Guiding | Crossed-roller Guiding | |
θ-Axis Rail |
Crossed-roller Bearing | Crossed-roller Bearing | |
Stage Material / Surface Treatment |
Aluminum Alloy / Black anodized | Aluminum Alloy / Black anodized | |
Accuracy Level |
Precision grade | Precision grade | |
Motor Direction |
Right Wiring | Left Wiring | |
Precision Spec. |
XY-Axis Resolution (Pulse) (µm) |
5 (Full) / 2.5 (Half) | 5 (Full) / 2.5 (Half) |
XY-Axis Max. Speed (Full Step) (mm/sec) |
10 | 10 | |
XY-Axis Positioning Precision (µm) |
10 | 10 | |
XY-Axis Repeatability Precision (µm) |
± 1 | ± 1 | |
XY-Axis Missed Step (µm) |
2 | 2 | |
θ-Axis Resolution (Pulse) (°) |
0.0047 (Full) / 0.0023 (Half) | 0.0047 (Full) / 0.0023 (Half) | |
θ-Axis Max. Speed (Full Step) (°/sec) |
8 | 8 | |
θ-Axis Positioning Precision (°) |
0.05 | 0.05 | |
θ-Axis Repeatability Precision (°) |
± 0.01 | ± 0.01 | |
θ-Axis Missed Step (°) |
0.01 | 0.01 | |
Parallelism (µm) |
30 | 30 | |
Dynamic Straightness (µm) |
20 | 20 | |
Dynamic Parallelism (µm) |
15 | 15 | |
Load Capacity (Kgf) |
10 | 10 | |
Electrical Spec. |
Motor Type |
2MS-N28D45A | 2MS-N28D45A |
Motor Brand |
GMT | GMT | |
Stage Side Connector |
15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS | 15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS | |
Controller Side Connector |
15-Pin female end connetor D-SUB / 12-Pin female end connetor HRS (Additional options) | 15-Pin female end connetor D-SUB / 12-Pin female end connetor HRS (Additional options) | |
Power Voltage |
24V ± 10% | 24V ± 10% | |
Control Output |
NPN open collector output under 24V 8mA | NPN open collector output under 24V 8mA | |
Output Control |
Testing (sensing):output transistor OFF (closed) | Testing (sensing):output transistor OFF (closed) |
System Configuration Diagram |
♦ For selection of the drivers preferred, please refer to the reference table or the catalogue of Motor・Driver.
♦ All of the drivers chosed are the specification of GMT preferred. For different needs, please choose the suitable drivers according to real functional needs. |
Axis Definition |
GMT has defined different axis as the following figuration according to the movement direction:
Horizontal movement direction is X and Y axis. Vertical movement direction is Z axis. Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis. Green arrows present the specified axis movement direction. |
Motor・driver Reference Table |
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