M5E-2000B-R
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★ It is consisted XYZ manual positioning stage and a tilt stage (θx, θy). It is a 5-axis high resolution positioning stage to be designed to perform the single-fiber positioning.
★ Available potion with ordering code – M5E-2000B-R-[XYZ module: MXYZ60-ACSR、Tilt module: MTR60-45R]
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Model No. |
M5E-2000B-R |
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Specification |
Axis |
X | Y | Z | θx | θy | |
|
Travel Stroke |
Rough Tuning |
± 6.5 mm | ± 6.5 mm | ± 6.5 mm | ± 3 ° | ± 3 ° | |
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Fine Tuning |
± 0.3 mm | ± 0.3 mm | ± 0.3 mm | ||||
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Accuracy |
Rough Tuning |
10 μm | 10 μm | 10 μm | ≒ 29.3″ / Vernier | ≒ 27.8″ / Vernier | |
|
Fine Tuning |
0.5 μm | 0.5 μm | 0.5 μm | ||||
| Feed Position |
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| Characterisitc of Different Guiding Type |
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| The Main Feeding Mode of Mini Stages |
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