M6E-2200B-R
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★ It is consisted XYZ manual positioning stage, a tilt stage (θx, θy) and a goniometer stage(θz). It is a 6-axis high resolution positioning stage to be designed to perform the single-fiber positioning or as the application for industry of optical waveguide.
★ Available potion with ordering code – M5E-2000B-R-[XYZ module: MXYZ60-ACSR、Tilt module: MTR60-45R、α-axis stage: MXG6-50VMR]
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Model No. |
M6E-2200B-R |
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Specification |
Axis |
X | Y | Z | θx | θy | θz | |
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Travel Stroke |
Rough Tuning |
± 6.5 mm | ± 6.5 mm | ± 6.5 mm | ± 3 ° | ± 3 ° | ± 4 ° | |
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Fine Tuning |
± 0.3 mm | ± 0.3 mm | ± 0.3 mm | |||||
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Accuracy |
Rough Tuning |
10 μm | 10 μm | 10 μm | ≒ 29.3″ / Vernier | ≒ 27.8″ / Vernier | ≒ 33″ / Vernier | |
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Fine Tuning |
0.5 μm | 0.5 μm | 0.5 μm | |||||
| Feed Position |
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| Characterisitc of Different Guiding Type |
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| The Main Feeding Mode of Mini Stages |
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