AXYR60 – Precision
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★3-axis-in-one design：High rigidity, Low energy consumption, Wide applications, Simple operation.
★Low profile, High moment rigidity.
★Patent：Integrated rotation angle to resolve limited moving stroke problems.
★Applied in small size panel production verification test, mobile phone and electronics industry etc.
★This product pic. shows as AXYR60-A2PR-ND.
★Low profile, High moment rigidity.
★Patent：Integrated rotation angle to resolve limited moving stroke problems.
★Applied in small size panel production verification test, mobile phone and electronics industry etc.
★This product pic. shows as AXYR60-A2PR-ND.
SKU: AXYR60-A2PR-ND
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Model No. |
AXYR60-A2PR-ND |
AXYR60-A2PL-ND |
AXYR60-A2UPR-CD |
AXYR60-A2UPL-CD |
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Mechanical Spec. |
Table Size (mm) |
Ø 60 | ||||
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Travel Stroke X Axis (mm) |
± 7.5 | |||||
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Travel Stroke Y Axis (mm) |
± 7.5 | |||||
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Travel Stroke θ Axis (°) |
± 8.5 | |||||
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Drive Type |
Ball Screw | |||||
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Rail XY Axis |
Crossed Roller Guiding | |||||
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Rail θ Axis |
Crossed Roller Bearing | |||||
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Stage Material / Surface Treatment |
Aluminum Alloy / Black anodized | |||||
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Accuracy Level |
P：Precision grade | UP：Ultra Precision grade | ||||
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Motor Assembly Direction |
Right | Left | Right | Left | ||
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Precision Spec. |
XY Axis Resolution (Pulse) (µm) |
5 (Full)；2.5 (Half) | 2 (Full)；1 (Half) | |||
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θ AxisResolution (Pulse) (°) |
0.0056 (Full)；0.0028 (Half) | 0.0022 (Full)；0.0011 (Half) | ||||
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XY Axis Max. Speed (Full Step) (mm / sec) |
10 | 5 | ||||
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θ Axis Max. Speed (Full Step) (° / sec) |
8 | |||||
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XY Axis Positioning Presion (µm) |
10 | 5 | ||||
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XY Axis Repeatability Precision (µm) |
± 1 | ± 0.5 | ||||
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θ Axis Positioning Presion (°) |
0.05 | 0.03 | ||||
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θ Axis Repeatability Precision (°) |
± 0.01 | ± 0.003 | ||||
|
Load Capacity (Kgf) |
6 | |||||
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XY Axis Missed Step (µm) |
2 | 1 | ||||
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θ Axis Missed Step (°) |
0.01 | 0.003 | ||||
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Parallelism (µm) |
20 | |||||
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Dynamic Straightness (µm) |
20 | |||||
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Dynamic Parallelism (µm) |
10 | |||||
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Electrical Spec. |
Motor Type |
2MS-N28D32A | SH5281-7211 | |||
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Motor Brand |
GMT | SANYO | ||||
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Connector |
Stage Side Connector |
15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS | ||||
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Controller Side Connector |
15-Pin female end connetor D-SUB / 12-Pin female end connetor HRS (Additional options) | |||||
|
Sensor |
Power Voltage |
24V ± 10% | ||||
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Control Output |
NPN open collector output under 24V 8mA | |||||
|
Output Control |
Testing (sensing)：output transistor OFF (closed) | |||||
| System Configuration Diagram |
| ♦ For selection of the drivers preferred, please refer to the reference table or the catalogue of Motor・Driver.
♦ All of the drivers chosed are the specification of GMT preferred. For different needs, please choose the suitable drivers according to real functional needs.
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| Axis Definition |
| GMT has defined different axis as the following figuration according to the movement direction:
Horizontal movement direction is X and Y axis. Vertical movement direction is Z axis. Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis. Green arrows present the specified axis movement direction.
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Motor・driver Reference Table |
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