|
Model No. |
AZ7010-A6OP |
AZ7010-S6OP |
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|
Mechanical Spec. |
Table Size (mm) |
70X70 | ||
|
Travel Stroke (mm) |
10 | |||
|
Drive Type |
Ball Screw Ø8,lead 1mm | |||
|
Rail |
Crossed-roller Bearing | |||
|
Stage Material / Surface Treatment |
Aluminum Alloy / Black anodized | Stainless Steel / Nickel plating | ||
|
Accuracy Level |
OP:Ultra Precision | |||
|
Wiring Method |
R:Right wiring (Standard);L:Left wiring | |||
|
Precision Spec. |
Resolution(Pulse) (µm) |
M:0.25 (Full);0.125 (Half)
J:0.5 (Full);0.25 (Half) |
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|
Max. Speed(Full Step) (mm/sec) |
5 | |||
|
Positioning Precision (µm) |
5 | |||
|
Repeatability Precision(µm) |
± 0.5 | |||
|
Load Capacity (Kgf) |
8 | 10 | ||
|
Missed Step (µm) |
1 | |||
|
Moment Stiffness |
Pitch:0.15 / Yaw:0.05 / Rolling:0.12 (“/N-cm) | |||
|
Parallelism (µm) |
20 | |||
|
Dynamic Straightness (µm) |
5 | |||
|
Dynamic Parallelism (µm) |
25 | |||
|
Electrical Spec. |
Motor |
Type / Shaft Numbers |
M:5-phase stepper high-resolution motor / ☐28 double shafts
J:5-phase stepper motor / ☐28 double shafts |
|
|
Brand / Model |
M:Orientalmotor / PK523HPMB
J:Orientalmotor / PKP523N12B |
|||
|
Driver Brand / Model |
Orientalmotor / CVD Series – 5 Phase stepping motor (Additional options) | |||
|
Connector |
Stage Side Connector |
15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS | ||
|
Controller Side Connector |
15-Pin female end connetor D-SUB (Additional options) / 12-Pin female end connetor HRS (Additional options) | |||
|
Sensor |
Power Voltage |
24V±10% | ||
|
Control Output |
NPN open collector output under 24V 8mA | |||
|
Output Control |
Testing (sensing):output transistor OFF (closed) | |||
| Multi-point repeated positioning accuracy |
| ♦ Accuracy measurement description
1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual ♦ Precision introduction 1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process. |
| System Configuration Diagram |
| ♦ For detailed specifications, please read the description for the stage and connecting cable.
♦ For selection of driver, please refer to the cross-reference table for the motor/driver of the standard motorized stage or the GMT motor and driver catalog. ♦ The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs. |
| Axis Definition |
| GMT has defined different axis as the following figuration according to the movement direction:
Horizontal movement direction is X and Y axis. Vertical movement direction is Z axis. Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis. Green arrows present the specified axis movement direction. |
Motor/driver |
|
Ball Screw Ø8,lead 1mm

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