Model No. |
ARH60-A2OPN |
||
Mechanical Spec. |
Table Size (mm) |
Ø 60 | |
Travel Stroke (°) |
± 7.5 | ||
Drive Type |
Ball Screw | ||
Rail |
Deep groove ball bearing | ||
Stage Material / Surface Treatment |
Aluminum Alloy / Black anodized | ||
Accuracy Level |
OP:Ultra Precision | ||
Wiring Method |
N:GMT Standard | ||
Precision Spec. |
Resolution(Pulse) (°) |
M: 0.00105 (Full);0.00055 (Half)
J: 0.0021 (Full);0.0011 (Half) |
|
Max. Speed(Full Step) (°/sec) |
10.5 | ||
Positioning Precision (°) |
0.03 | ||
Repeatability Precision(°) |
± 0.003 | ||
Load Capacity (Kgf) |
8 | ||
Missed Step |
< 0.003° | ||
Moment Stiffness |
0.32 (“/N-cm) | ||
Parallelism (μm) |
30 | ||
Dynamic concentricity (μm) |
30 | ||
Dynamic Parallelism (μm) |
10 | ||
Electrical Spec. |
Motor |
Type / Shaft Numbers |
M: 5-phase stepper high-resolution motor / ☐28 double shafts
J: 5-phase stepper motor / ☐28 double shafts |
Brand / Model |
M: Orientalmotor / PK523HPMB
J: Orientalmotor / PKP523N12B |
||
Driver Brand / Model |
Orientalmotor / CVD Series – 5 Phase stepping motor (Additional options) | ||
Connector |
Stage Side Connector |
15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS | |
Controller Side Connector |
15-Pin female end connetor D-SUB (Additional options) / 12-Pin female end connetor HRS (Additional options) | ||
Sensor |
Power Voltage |
24V±10% | |
Control Output |
NPN open collector output under 24V 8mA | ||
Output Control |
Testing (sensing):output transistor OFF (closed) |
Multi-point repeated positioning accuracy |
♦ Accuracy measurement description
1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual ♦ Precision introduction 1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process. |
System Configuration Diagram |
♦ For detailed specifications, please read the description for the stage and connecting cable.
♦ For selection of driver, please refer to the cross-reference table for the motor/driver of the standard motorized stage or the GMT motor and driver catalog. ♦ The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs. |
Axis Definition |
GMT has defined different axis as the following figuration according to the movement direction:
Horizontal movement direction is X and Y axis. Vertical movement direction is Z axis. Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis. Green arrows present the specified axis movement direction. |
Motor/driver |
Ball Screw Ø8,lead 1mm
Đánh giá
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