Model No. |
CXN80 |
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Mechanical Spec. |
Table Size (mm) |
80X80 | ||||
Travel Stroke (mm) |
30 | 50 | 75 | 100 | ||
Drive Type |
Ball Screw Ø8,lead 1mm | Ball Screw Ø8,lead 2mm | ||||
Rail |
Circular Linear Ball Guiding | |||||
Stage Material / Surface Treatment |
Stainless Steel / Nickel plating | |||||
Accuracy Level |
OP:Ultra Precision | |||||
Wiring Method |
N:GMT Standard | |||||
Precision Spec. |
Resolution(Pulse) (µm) |
M: 1 (Full);0.5 (Half)
J: 2 (Full);1 (Half) |
M: 2 (Full);1 (Half)
J: 4 (Full);2 (Half) |
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Max. Speed(Full Step) (mm/sec) |
15 | 30 | ||||
Positioning Precision (µm) |
5 | 7 | 10 | |||
Repeatability Precision(µm) |
±0.5 | |||||
Multi-point Repeatability Precision(µm) |
A: 1.5 / B: 1 | |||||
Load Capacity (Kgf) |
16 | |||||
Missed Step (µm) |
1 | |||||
Moment Stiffness |
Pitch: 0.05 / Yaw: 0.05 / Rolling: 0.05 (“/N-cm) | |||||
Pitch / Yaw |
Pitch: < 20″ / Yaw: < 15″ | |||||
Parallelism (µm) |
20 | |||||
Dynamic Straightness (µm) |
2 | 4 | ||||
Dynamic Parallelism (µm) |
10 | |||||
Electrical Spec. |
Motor |
Type / Shaft Numbers |
M: 5-phase stepper high-resolution motor / ☐28 double shafts
J: 5-phase stepper motor / ☐28 double shafts |
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Brand / Model |
M: Orientalmotor / PK523HPMB
J: Orientalmotor / PKP523N12B |
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Driver Brand / Model |
Orientalmotor / CVD Series – 5 Phase stepping motor (Additional options) | |||||
Connector |
Stage Side Connector |
15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS | ||||
Controller Side Connector |
15-Pin female end connetor D-SUB (Additional options) / 12-Pin female end connetor HRS (Additional options) | |||||
Sensor |
Origin Sensor |
Photoelectric sensor GMT-sensor | ||||
Limit Sensor |
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Origin Approximation Sensor |
N / A | |||||
Power Voltage |
24V±10% | |||||
Control Output |
NPN open collector output under 24V 8mA | |||||
Output Control |
Testing (sensing):output transistor OFF (closed) |
Multi-point repeated positioning accuracy |
♦ Accuracy measurement description
1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual ♦ Precision introduction 1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process. |
System Configuration Diagram |
♦ For detailed specifications, please read the description for the stage and connecting cable.
♦ For selection of driver, please refer to the cross-reference table for the motor/driver of the standard motorized stage or the GMT motor and driver catalog. ♦ The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs. |
Axis Definition |
GMT has defined different axis as the following figuration according to the movement direction:
Horizontal movement direction is X and Y axis. Vertical movement direction is Z axis. Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis. Green arrows present the specified axis movement direction. |
Motor/driver |
Ball Screw Ø8,lead 1mm
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