Model No. |
M6E-2200B-L |
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Specification |
Axis |
X | Y | Z | θx | θy | θz | |
Travel Stroke |
Rough Tuning |
± 6.5 mm | ± 6.5 mm | ± 6.5 mm | ± 3 ° | ± 3 ° | ± 4 ° | |
Fine Tuning |
± 0.3 mm | ± 0.3 mm | ± 0.3 mm | |||||
Accuracy |
Rough Tuning |
10 μm | 10 μm | 10 μm | ≒ 29.3″ / Vernier | ≒ 27.8″ / Vernier | ≒ 33″ / Vernier | |
Fine Tuning |
0.5 μm | 0.5 μm | 0.5 μm |
Feed Position |
Characterisitc of Different Guiding Type |
The Main Feeding Mode of Mini Stages |
Đánh giá
Chưa có đánh giá nào.