| Model no. | Work bench size (mm) | Base size (mm) | Travel stroke (mm) | Loading (kgf) |
| GAS00-350SC | 350×350 | 350×350 | ±10x±10 | Fv 45 ≦ 0.01 mm ; Fs 500 ≦ 0.01 mm |
| GAS00-350WC | 350×350 | 350×350 | ±10x±10 | Fv 45 ≦ 0.01 mm ; Fs 500 ≦ 0.01 mm |
更新日期(Update):2018.01.24
★ Light-weight and Extra-thin-It creates the wing-free thin & lighter mechanism by applying the XYθ module.
★ The cross-roller bearings have been pre-loaded, to perform the whole unit high precision and rigidity.
★ Hollow structure-It can be used for the optical inspection devices or conduction tester.
★ Longer usage life and reliable accuracy of the Alignment stage itself is guaranteed by lubrication.
★ All products are Cryogenic Treatment. It can not only significantly upgrade the toughness and operation lifetime but also improve the dimension stability of materials.
★ 3D CMM- Ensure the quality and precision of the stage.
| Model no. | Work bench size (mm) | Base size (mm) | Travel stroke (mm) | Loading (kgf) |
| GAS00-350SC | 350×350 | 350×350 | ±10x±10 | Fv 45 ≦ 0.01 mm ; Fs 500 ≦ 0.01 mm |
| GAS00-350WC | 350×350 | 350×350 | ±10x±10 | Fv 45 ≦ 0.01 mm ; Fs 500 ≦ 0.01 mm |
更新日期(Update):2018.01.24
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