EXYR60 – Precision
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★ Achieving zero backlash and high accuracy.
★ The height is less 50% and length is shorter 20% than other multi-axis products.
★ Extended the usage life.
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Model No. |
EXYR60-A2PR-ND |
EXYR60-A2PL-ND |
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Mechanical Spec. |
Table Size (mm) |
Ø 60 | Ø 60 |
|
XY-Axis Travel Stroke (mm) |
± 7.5 | ± 7.5 | |
|
θ-Axis Travel Stroke (°) |
± 8.5 | ± 8.5 | |
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Drive Type |
Ball screw | Ball screw | |
|
XY-Axis Rail |
Crossed-roller Guiding | Crossed-roller Guiding | |
|
θ-Axis Rail |
Crossed-roller Bearing | Crossed-roller Bearing | |
|
Stage Material / Surface Treatment |
Aluminum Alloy / Black anodized | Aluminum Alloy / Black anodized | |
|
Accuracy Level |
Precision grade | Precision grade | |
|
Motor Direction |
Right Wiring | Left Wiring | |
|
Precision Spec. |
XY-Axis Resolution (Pulse) (µm) |
5 (Full) / 2.5 (Half) | 5 (Full) / 2.5 (Half) |
|
XY-Axis Max. Speed (Full Step) (mm/sec) |
10 | 10 | |
|
XY-Axis Positioning Precision (µm) |
10 | 10 | |
|
XY-Axis Repeatability Precision (µm) |
± 1 | ± 1 | |
|
XY-Axis Missed Step (µm) |
2 | 2 | |
|
θ-Axis Resolution (Pulse) (°) |
0.0056 (Full) / 0.0028 (Half) | 0.0056 (Full) / 0.0028 (Half) | |
|
θ-Axis Max. Speed (Full Step) (°/sec) |
8 | 8 | |
|
θ-Axis Positioning Precision (°) |
0.05 | 0.05 | |
|
θ-Axis Repeatability Precision (°) |
± 0.01 | ± 0.01 | |
|
θ-Axis Missed Step (°) |
0.01 | 0.01 | |
|
Parallelism (µm) |
20 | 20 | |
|
Dynamic Straightness (µm) |
20 | 20 | |
|
Dynamic Parallelism (µm) |
10 | 10 | |
|
Load Capacity (Kgf) |
6 | 6 | |
|
Electrical Spec. |
Motor Type |
2MS-N28D32A | 2MS-N28D32A |
|
Motor Brand |
GMT | GMT | |
|
Stage Side Connector |
15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS | 15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS | |
|
Controller Side Connector |
15-Pin female end connetor D-SUB / 12-Pin female end connetor HRS (Additional options) | 15-Pin female end connetor D-SUB / 12-Pin female end connetor HRS (Additional options) | |
|
Power Voltage |
24V ± 10% | 24V ± 10% | |
|
Control Output |
NPN open collector output under 24V 8mA | NPN open collector output under 24V 8mA | |
|
Output Control |
Testing (sensing)：output transistor OFF (closed) | Testing (sensing)：output transistor OFF (closed) | |
| System Configuration Diagram |
| ♦ For selection of the drivers preferred, please refer to the reference table or the catalogue of Motor・Driver.
♦ All of the drivers chosed are the specification of GMT preferred. For different needs, please choose the suitable drivers according to real functional needs.
|
| Axis Definition |
| GMT has defined different axis as the following figuration according to the movement direction:
Horizontal movement direction is X and Y axis. Vertical movement direction is Z axis. Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis. Green arrows present the specified axis movement direction.
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Motor・driver Reference Table |
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