CXS80 – Ultra Precision
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★ Guide-Linear ball, Gothic arc-groove formed by dual arc-grooves individually on upper and lower rails of body. Ball moving in single groove is structured by 2 points-contact, and total 4contact points in dual arc-groove to form strong rail constructure.
★ Transmission Parts-Ball screw, It transmits through the ball involving in the locknut and screw to reach the accuracy and longer operation lifetime.
★ Material-Stainless Steel
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Model No. |
CXS80 |
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Mechanical Spec. |
Table Size (mm) |
80X80 | ||
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Travel Stroke (mm) |
20、30、50 | |||
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Drive Type |
Ball Screw Ø8，lead 1mm | |||
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Rail |
Linear Ball Guiding | |||
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Stage Material / Surface Treatment |
Stainless Steel / Nickel plating | |||
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Accuracy Level |
OP：Ultra Precision | |||
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Wiring Method |
N：GMT Standard | |||
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Precision Spec. |
Resolution(Pulse) (µm) |
M: 1 (Full)；0.5 (Half)
J: 2 (Full)；1 (Half) |
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Max. Speed(Full Step) (mm/sec) |
15 | |||
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Positioning Precision (µm) |
5 | |||
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Repeatability Precision(µm) |
±0.5 | |||
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Multi-point Repeatability Precision(µm) |
A: 1.5 / B: 1 | |||
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Load Capacity (Kgf) |
8 | |||
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Missed Step (µm) |
1 | |||
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Moment Stiffness |
Pitch: 0.07 / Yaw: 0.05 / Rolling: 0.05 (“/N-cm) | |||
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Pitch / Yaw |
Pitch: < 20″ / Yaw: < 15″ | |||
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Parallelism (µm) |
20 | |||
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Dynamic Straightness (µm) |
2 | |||
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Dynamic Parallelism (µm) |
10 | |||
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Electrical Spec. |
Motor |
Type / Shaft Numbers |
M: 5-phase stepper high-resolution motor / ☐28 double shafts
J: 5-phase stepper motor / ☐28 double shafts |
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Brand / Model |
M: Orientalmotor / PK523HPMB
J: Orientalmotor / PKP523N12B |
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Driver Brand / Model |
Orientalmotor / CVD Series – 5 Phase stepping motor (Additional options) | |||
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Connector |
Stage Side Connector |
15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS | ||
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Controller Side Connector |
15-Pin female end connetor D-SUB (Additional options) / 12-Pin female end connetor HRS (Additional options) | |||
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Sensor |
Origin Sensor |
Photoelectric sensor GMT-sensor | ||
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Limit Sensor |
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Origin Approximation Sensor |
N / A | |||
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Power Voltage |
24V±10% | |||
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Control Output |
NPN open collector output under 24V 8mA | |||
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Output Control |
Testing (sensing)：output transistor OFF (closed) | |||
| Multi-point repeated positioning accuracy |
| ♦ Accuracy measurement description
1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual ♦ Precision introduction 1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process.
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| System Configuration Diagram |
| ♦ For detailed specifications, please read the description for the stage and connecting cable.
♦ For selection of driver, please refer to the cross-reference table for the motor/driver of the standard motorized stage or the GMT motor and driver catalog. ♦ The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs.
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| Axis Definition |
| GMT has defined different axis as the following figuration according to the movement direction:
Horizontal movement direction is X and Y axis. Vertical movement direction is Z axis. Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis. Green arrows present the specified axis movement direction.
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Motor/driver |
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