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Home / Ultra Precision Positioning Module / Multi-axis Type

A6E-6700S

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Model No.

A6E-6700S

Axial

X Y Z θz θx θy

L

AX7050-S2PL AX7050-S2PR AZ7010-S6PL AXG6-75VM-R AXG6-100VM-R AXG4-40VM-L

R

AX7050-S2PR AX7050-S2PL AZ7010-S6PR AXG6-75VM-L AXG6-100VM-L AXG4-40VM-R

Travel Stroke

50 mm 50 mm 10 mm ± 8° ± 6° ± 8°

Screw lead

1 mm 1 mm 1 mm(斜率1:2) N/A N/A N/A

Reduction ratio

N/A N/A N/A 1/225 1/292 1/240

Motor Specifications

CVK544BK CVK523BK

Decomposition Energy

2 μm (Full) 2 μm (Full) 1 μm (Full) 0.0032° (Full) 0.0025° (Full) 0.003° (Full)

Positioning Precision

5 μm 5 μm 5 μm N/A N/A N/A

Repeatability Precision

± 0.5 μm ± 0.5 μm ± 0.5 μm  ± 0.003°  ± 0.003°  ± 0.003°

 

Multi-point repeated positioning accuracy
♦   Accuracy measurement description

1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual
The difference between the movement value and the target movement value, and the maximum error value is taken. This value is the unidirectional positioning accuracy.
2. Multi-point repeated positioning accuracy: within the range of the predetermined detection stroke, when the mechanical program is executed, the position accuracy obtained by repeatedly running the same program code
degree. Calculate the position deviation that occurs when the same position is repeated back and forth, and obtain the deviation value between the two.

♦   Precision introduction

1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process.
2. The detection of GMT high-end precision linear slide module series adopts multi-point repeated measurement, that is, multi-point quantity measurement within a fixed stroke range (points
The amount is increased or decreased according to the length of the stroke), and the actual change of the round-trip position error is recorded, in pursuit of high precision and repeatability.
3. Through the non-contact laser interferometer measurement, to ensure that the unidirectional positioning is within 10μm, and the multipoint repetitive positioning accuracy is within 1.5μm. If there is a need for higher precision and precision, please contact the regional sales/business team.

 

System Configuration Diagram
♦   For detailed specifications, please read the description for the stage and connecting cable.

♦   For selection of driver, please refer to the cross-reference table for the motor/driver of the standard motorized stage or the GMT motor and driver catalog.

♦   The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs.

 

Axis Definition
GMT has defined different axis as the following figuration according to the movement direction:

Horizontal movement direction is X and Y axis.

Vertical movement direction is Z axis.

Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis.

Green arrows present the specified axis movement direction.

 

Motor/driver

 

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DINGHONGGMT SALE CONTACT 8H00 AM - 17H00 PM

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  • Trang chủ
  • Sản phẩm tự động hóa
    • Linear Motion Components
      • Ball Screw Support Units
        • Fixed Side
        • Heavy Load Fixed Side
        • Support Side
        • Lock Nut
        • Spacer Ring
      • Ball Screws
        • Flanged
        • Threaded
        • Rectangular
        • Stepper motor direct drive ball screws
      • Feeding Screws
      • Miniature Guide Ways
        • Standard Rail
        • Wide Rail
      • Couplings
        • Flexible Spiral Beam Coupling
        • Flexible Disk Coupling
        • Flexible Bellows Coupling
        • Flexible Oldham Coupling
        • Flexible Jaw Coupling
        • Rigidity Coupling
      • Slide Rail Sets
      • Slide Tables
      • Gonio Ways
      • Cross Roller Bearings
    • Precision Stages/Alignment Stages
      • Motorized Stages
        • Linear_Precision Stage
        • Linear_Standard Stage
        • Rotary Stage
        • XY-TABLE
      • Manual Stages
        • Crossed Roller Stage
          • AL Stage – X Axis
          • AL Stage – XY Axis
          • AL Stage – Z Axis
          • AL Thin Type Stage – X Axis
          • AL Thin Type Stage – XY Axis
          • AL Thin Type Stage – Z Axis
          • AL Super Thin Type Stage – XY Axis
          • AL Stage – XZ Axis
          • AL Stage – XYZ Axis
          • AL Stage – Multi-Axis
          • AL Stage – Multi-Axis (Thin Type)
        • Crossed Roller Stage – Feeding Screw Design
          • AL Stage – X Axis
          • AL Stage – XY Axis
        • Linear Ball Stage
          • SUS Stage – X Axis
          • SUS Stage – XY Axis
          • SUS Stage – Z Axis
          • SUS Stage – XZ Axis
          • SUS Stage – XYZ Axis
          • SUS Thin Type Stage – XY Axis
          • Carbon Steel Stage – X Axis
          • Carbon Steel Stage – XY Axis
          • Carbon Steel Stage – Z Axis
          • Carbon Steel Stage – XZ Axis
          • Carbon Steel Stage – XYZ Axis
        • Ball Bearing Stage – Feeding Screw Design
          • SUS Stage – X Axis
          • SUS Stage – XY Axis
          • Carbon Steel Stage – X Axis
          • Carbon Steel Stage – XY Axis
        • Dovetail Stage
          • Feeding Screw – X Axis
          • Feeding Screw – XY Axis
          • Feeding Screw – Z Axis
          • Rack & Pinion – X Axis
          • Rack & Pinion – XY Axis
          • Rack & Pinion – Z Axis
          • Rack & Pinion – X+Z Axis
          • Rack & Pinion – XY+Z Axis
          • Hex. Wrench Design – X Axis
          • Hex. Wrench Design – XY Axis
          • Hex. Wrench Design – Z Axis
          • Hex. Wrench Design – XY+Z Axis
        • Z Axis Stage
          • Crossed Roller Guide – Z Axis
          • Dovetail Type – Rack & Pinion Guide – Z Axis
          • Dovetail Type – X+Z Axis
          • Laboratory Jack Type – Z Axis
        • Rotation Stage
          • Precision Grade
          • Thin Design & Precision Grade
          • Economic Grade
        • Goniometer Stage
          • Goniometer Stage – α Axis
          • Goniometer Stage – αβ Axis
        • Tilt Stage
          • Feeding Screw Type
          • Thumb Screw Type
        • Vice Clamping Fixture
        • Magnetic Base
          • Standard Type
          • Thin Type
        • Adapting Plate
          • Adapting Bracket
          • Adjustable Spacer
          • Adapting Plate
        • Micrometer
      • Alignment Stages
      • Special Specification
    • Automation Module Series
      • Electric Cylinder Series
        • Slider Type
        • Sliding Table Type
        • Rod Type
      • Actuators
      • Electric Grippers
      • Hollow Rotary Stages
      • Rotary swing modules
    • Optical Components
      • Hi-resolution stage
      • Optical Table
    • Motor/Drive
      • Motor
        • Servo Motor
        • Stepper Motor
          • 2-Phase Stepping Motor
          • 5-Phase Stepper Motor
      • Driver
        • Servo Driver
        • Stepper Driver
          • 2-Phase Bipolar Micro-Stepper Motor Driver
          • 2-Phase Unipolar Micro-Stepper Motor Driver
          • 2-Phase Bipolar Closed Loop Driver
          • 5-Phase Half/Full Stepper Motor Driver
          • 5-Phase Micro-Stepper Motor Driver
          • 2-Phase Bipolar Stepper Motor Driver
      • Gear Reducer
    • Ultra Precision Positioning Module
      • Goniometer Type
      • Linear Type
      • Multi-axis Type
      • Rotary Type
    • Heat shrink fit tooling system
  • Linh kiện cơ khí chính xác
    • Linh Kiện Khuôn Dập
    • Linh Kiện Khuôn Nhựa
    • Trục Bạc Dẫn Hướng
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